This barium strontium titanate (BaO4SrTi) sputtering target with elastomer bonding is a source material for thin film deposition. It has a purity of 99.99%, a diameter size of 8'' and a thickness of 0.250'', and is supplied as a single piece.
Barium strontium titanate (BST) is a solid solution of barium titanate (BaTiO3) and strontium titanate (SrTiO3). Sputtered BST films are valued for their high dielectric constant, tunability and low dielectric loss, which has made BST-based ferroelectric thin film devices widely studied for tunable microwave components such as delay lines, resonators, phase shifters and varactors.
Sputter deposition is a repeatable process that scales from small research projects to production batches on medium to large substrate areas. Its many process parameters give experienced users close control over film growth and microstructure, and researchers continue to examine factors such as oxygen vacancies, film thickness, grain size, Ba/Sr ratio, doping and annealing to improve tunability and reduce loss.
- Deposition of BST dielectric thin films onto substrates such as silicon wafers.
- Fabrication of tunable microwave devices including delay lines, resonators, phase shifters and varactors.
- Research on dielectric tunability as affected by film thickness, grain size, Ba/Sr ratio, doping and annealing.
- Development of multilayer ferroelectric thin film structures aiming for higher tunability and lower loss.
| Brand | Nanografi |
|---|---|
| CAS number | — |
| Molecular formula | — |
| Purity | 99.99% |
| Category | — |
| Pack sizes | 1 piece |
| Physical form | — |
| Storage | — |
- Product code: NG0ST01BA29
- Material: Barium Strontium Titanate (BaO4SrTi)
- Bonding: Elastomer
- Size: 8''
- Thickness: 0.250''
- Product code: NG0ST01BA29
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