This barium titanate (BaTiO3) sputtering target is a 99.99% pure disc measuring 4'' across and 0.125'' thick, supplied in an elastomer version. It serves as the source material for sputter deposition of barium titanate thin films onto substrates such as silicon wafers.
Barium titanate is an inorganic ferroelectric ceramic. It is white in powder form and transparent as large crystals, and it shows piezoelectric behaviour as well as the photorefractive effect. These properties make sputtered BaTiO3 films useful in electronic ceramics and in devices such as capacitors, sensors and detectors.
Sputter deposition gives repeatable results and scales from small research projects to production batches covering medium to large substrate areas. Its many process parameters give experienced users close control over film growth and microstructure.
- Deposition of barium titanate thin films on substrates such as silicon wafers.
- Fabrication of barium titanate films for electronic ceramics.
- Thin-film layers for capacitors, sensors and detectors.
- Sputter etching where high etching anisotropy is required.
- Depth analysis by secondary ion mass spectrometry (SIMS), where the target is sputtered at a constant rate.
| Brand | Nanografi |
|---|---|
| CAS number | — |
| Molecular formula | — |
| Purity | 99.99% |
| Category | — |
| Pack sizes | 1 piece |
| Physical form | — |
| Storage | — |
- Product code: NG0ST01BA47
- Material: Barium Titanate (BaTiO3)
- Size: 4''
- Thickness: 0.125''
- Type: Elastomer
- Product code: NG0ST01BA47
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