Carbon (graphite) sputtering targets are solid source materials used in physical vapor deposition (PVD). Graphite is a crystalline allotrope of carbon made of stacked graphene layers. In sputtering, the target is bombarded with energetic ions so that carbon atoms are ejected and deposited as thin films on a substrate.
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- Deposition of carbon-based thin films for materials research
- Fabrication of conductive or electrode layers in electronics research
- Protective and functional carbon coatings studied in surface engineering
- Preparation of substrates and interfaces for carbon-based device research
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