Carbon (C) pyrolytic graphite sputtering targets are solid source materials made from pyrolytic graphite, a carbon material formed by chemical vapor deposition at high temperature, which yields a dense, highly oriented layered structure. Within the carbon materials group, these targets are used as the source in physical vapor deposition (PVD) processes to deposit carbon thin films onto substrates.
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- Deposition of carbon thin films for materials research
- Fabrication of carbon-based coatings and protective layers
- Electrode and interface layer development in electronic device R&D
- Studies of carbon film structure and growth in vacuum deposition systems
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