Lead zirconium titanate (PZT, PbZrTiO3) is a perovskite oxide ceramic belonging to the piezoelectric and ferroelectric material group. As a sputtering target, it serves as the source material in physical vapor deposition (PVD) processes, where it is used to deposit thin films with electromechanical properties.
- 1 piece
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- Thin-film piezoelectric MEMS sensors and actuators
- Ferroelectric random-access memory (FeRAM) research
- Pyroelectric and infrared detector thin films
- Piezoelectric energy harvesting device development
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