This lead zirconium titanate (PZT, O5PbTiZr) sputtering target from Nanografi is a 99.9% pure ceramic disc measuring 2'' in size and 0.125'' thick, supplied as a single piece for thin film deposition by sputtering.
PZT is an inorganic ceramic with a perovskite structure and a strong piezoelectric response: it deforms when an electric field is applied. This behaviour makes it a working material for ultrasonic transducers and piezoelectric resonators. PZT films can be grown by sol-gel, pulsed laser deposition, MOCVD and RF magnetron sputtering, and RF magnetron sputtering is regarded as a dependable route because it gives uniform films with smooth surfaces.
Sputter deposition erodes material from the target onto a substrate such as a silicon wafer. The process is repeatable, works on substrates of many shapes and sizes, and scales from small R&D work to production batches covering medium to large areas. Its many process parameters give experienced users fine control over film growth and microstructure.
- Depositing PZT thin films on substrates such as silicon wafers by RF magnetron sputtering.
- Fabricating piezoelectric films for ultrasonic transducers and piezoelectric resonators.
- Research and development of thin film processes that can later be scaled to production batches.
- Sputter etching where high etching anisotropy is required and selectivity is not a concern.
| Brand | Nanografi |
|---|---|
| CAS number | — |
| Molecular formula | — |
| Purity | 99.9% |
| Category | — |
| Pack sizes | 1 piece |
| Physical form | — |
| Storage | — |
- Product code: NG0ST01LE49
- Material: Lead Zirconium Titanate/PZT (O5PbTiZr)
- Size: 2''
- Thickness: 0.125''
- Product code: NG0ST01LE49
—
—