This lead zirconium titanate (PZT, O5PbTiZr) sputtering target from Nanografi is a 3'' disc, 0.250'' thick, with 99.9% purity. It serves as the source material for physical vapour deposition of PZT thin films onto substrates such as silicon wafers.
PZT is an inorganic ceramic with a perovskite structure and a strong piezoelectric response: it deforms when an electric field is applied. This property makes it a key material for ultrasonic transducers and piezoelectric resonators.
PZT films can be prepared by sol-gel processing, pulsed laser deposition, MOCVD and RF magnetron sputtering. RF magnetron sputtering is regarded as a dependable route because it yields uniform films with smooth surfaces. Sputter deposition is repeatable, scales from small R&D work to production batches covering medium to large substrate areas, and its many process parameters give fine control over film growth and microstructure.
- Deposition of PZT thin films by RF magnetron sputtering onto substrates such as silicon wafers.
- Fabrication of piezoelectric films for ultrasonic transducers.
- Development of thin-film piezoelectric resonators.
- Sputter etching where high etching anisotropy is required and selectivity is not critical.
- Compositional analysis work such as secondary ion mass spectrometry (SIMS).
| Brand | Nanografi |
|---|---|
| CAS number | — |
| Molecular formula | O5PbTiZr |
| Purity | 99.9% |
| Category | — |
| Pack sizes | 1 piece |
| Physical form | — |
| Storage | — |
- Product code: NG0ST01LE52
- Material: Lead Zirconium Titanate (PZT)
- Size: 3''
- Thickness: 0.250''
- Product code: NG0ST01LE52
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