This lead zirconium titanate (PZT, O5PbTiZr) sputtering target is supplied at 99.9% purity in a 6'' size with a thickness of 0.125''. It is intended for sputter deposition of PZT thin films onto substrates such as silicon wafers, from small research setups through to production runs covering medium to large substrate areas.
PZT is an inorganic ceramic with a perovskite structure and a strong piezoelectric effect: the material changes shape when an electric field is applied. This property makes it a key material for ultrasonic transducers and piezoelectric resonators.
PZT thin films can be prepared by sol-gel processing, pulsed laser deposition, MOCVD and RF magnetron sputtering. RF magnetron sputtering is regarded as a reliable route because it gives uniform films with smooth surfaces. Sputtering is repeatable and scalable, and its many process parameters give experienced users close control over film growth and microstructure.
- Deposition of piezoelectric PZT thin films by RF magnetron sputtering.
- Fabrication of thin-film layers for ultrasonic transducers and piezoelectric resonators.
- Sputter etching where highly anisotropic etching is required and selectivity is not critical.
- Compositional analysis by sputtering, such as in secondary ion mass spectrometry (SIMS).
| Brand | Nanografi |
|---|---|
| CAS number | — |
| Molecular formula | O5PbTiZr |
| Purity | 99.9% |
| Category | — |
| Pack sizes | 1 piece |
| Physical form | — |
| Storage | — |
- Product code: NG0ST01LE57
- Material: Lead Zirconium Titanate (PZT)
- Size: 6''
- Thickness: 0.125''
- Product code: NG0ST01LE57
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