This lead zirconium titanate (PZT, O5PbTiZr) sputtering target from Nanografi is a 99.9% purity disc measuring 7'' in size and 0.125'' thick. It serves as the source material for growing PZT thin films in sputter deposition systems.
PZT is an inorganic ceramic with a perovskite structure and a strong piezoelectric response: it deforms when an electric field is applied. This behaviour makes it a key material for ultrasonic transducers and piezoelectric resonators. PZT films can be produced by sol-gel, pulsed laser deposition, MOCVD and RF magnetron sputtering, and the chosen route influences the electrical and structural properties of the film. RF magnetron sputtering is regarded as a dependable option because it gives uniform, smooth films.
Sputtering itself is a repeatable technique that works on substrates of many shapes and sizes and scales from small R&D runs to medium and large production batches. Its many process parameters give experienced users close control over film growth and microstructure.
- Deposition of PZT thin films onto substrates such as silicon wafers.
- Fabrication of piezoelectric films for ultrasonic transducers and piezoelectric resonators.
- RF magnetron sputtering of uniform, smooth piezoelectric layers.
- Sputter etching where high etching anisotropy is required.
- Surface composition analysis such as secondary ion mass spectrometry (SIMS).
| Brand | Nanografi |
|---|---|
| CAS number | — |
| Molecular formula | O5PbTiZr |
| Purity | 99.9% |
| Category | — |
| Pack sizes | 1 piece |
| Physical form | — |
| Storage | — |
- Product code: NG0ST01LE59
- Material: Lead Zirconium Titanate (PZT)
- Size: 7''
- Thickness: 0.125''
- Product code: NG0ST01LE59
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