Lead zirconium titanate, commonly abbreviated PZT and written as Pb(Zr,Ti)O3, is a ceramic perovskite oxide belonging to the piezoelectric and ferroelectric materials group. It is widely studied for its strong electromechanical coupling. Sputtering targets of this material are used in physical vapor deposition to form thin films on substrates for research and development. Film properties depend strongly on deposition conditions and target composition, making the target a key starting point for process development.
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- Piezoelectric MEMS sensor and actuator research
- Thin-film ultrasonic transducer and microphone development
- Ferroelectric memory (FeRAM) device studies
- Pyroelectric infrared detector research
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