This lithium cobalt oxide (LiCoO2) sputtering target from Nanografi is a 2'' disc, 0.125'' thick, with a purity of 99.9% and an indium bond. It is intended for sputter deposition of LiCoO2 thin films, the cathode material widely used in the positive electrodes of lithium-ion batteries.
LiCoO2 is a dark blue or bluish-gray crystalline solid. As a sputtering source it is mainly used to build thin film batteries, which can power low-power devices such as portable electronics and micro electro mechanical systems (MEMS) as these devices keep shrinking.
Sputter deposition is repeatable and can move from small research projects to production batches covering medium to large substrate areas. In a typical D.C. magnetron setup, the target is bonded to a backing plate and forms part of the cathode assembly in an evacuated chamber filled with an inert gas such as argon; ions striking the target release material that deposits as a LiCoO2 film on the substrate.
- Deposition of LiCoO2 cathode thin films for thin film lithium-ion batteries.
- Power sources for MEMS and low-power portable electronic devices.
- D.C. magnetron sputtering of thin films onto substrates such as silicon wafers.
- Sputter etching where high etching anisotropy is required.
- Materials analysis such as secondary ion mass spectrometry (SIMS).
| Brand | Nanografi |
|---|---|
| CAS number | — |
| Molecular formula | — |
| Purity | 99.9% |
| Category | — |
| Pack sizes | — |
| Physical form | Dark blue or bluish-gray crystalline solid |
| Storage | — |
- Product code: NG0ST01LI09
- Material: Lithium Cobalt Oxide (LiCoO2)
- Size: 2''
- Thickness: 0.125''
- Bonding: Indium
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