This lithium cobalt oxide (LiCoO2) sputtering target from Nanografi is a 3'' diameter, 0.125'' thick disc with 99.9% purity, supplied with indium for bonding. It is intended for depositing LiCoO2 thin films by sputtering, most notably as the positive electrode layer in thin film lithium-ion batteries.
LiCoO2 is a dark blue or bluish-gray crystalline compound widely used as the cathode material in lithium-ion cells. Thin film batteries built with it can power low power devices such as portable electronics and micro electro mechanical systems (MEMS), where only very small currents are needed.
In a typical setup, the target is bonded to a backing plate and mounted as part of the cathode assembly in a D.C. magnetron sputter system. An evacuated chamber is filled with an inert gas, preferably argon; ionized gas strikes the target and the ejected material settles as a LiCoO2 film on a substrate placed near the anode. Sputtering is repeatable and can be scaled from small R&D work to production batches covering medium to large substrate areas.
- Deposition of LiCoO2 cathode thin films for thin film lithium-ion batteries.
- Fabrication of micro power sources for portable electronic devices and MEMS.
- D.C. magnetron sputtering of LiCoO2 films onto substrates such as silicon wafers.
- Research and development of thin film deposition processes that can later be scaled to production batches.
| Brand | Nanografi |
|---|---|
| CAS number | — |
| Molecular formula | — |
| Purity | 99.9% |
| Category | — |
| Pack sizes | 1 piece |
| Physical form | Dark blue or bluish-gray crystalline solid |
| Storage | — |
- Product code: NG0ST01LI10
- Material: Lithium Cobalt Oxide (LiCoO2)
- Size: 3''
- Thickness: 0.125''
- Bonding: Indium
- Product code: NG0ST01LI10
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