This lithium cobalt oxide (LiCoO2) sputtering target from Nanografi has a purity of 99.9%, a diameter of 4'' and a thickness of 0.125'', and is supplied with indium bonding. It serves as the source material for depositing LiCoO2 thin films by sputtering, a technique that coats substrates of many shapes and sizes and scales from small R&D work to medium and large production substrates.
LiCoO2 is a dark blue or bluish-gray crystalline compound widely used as the positive electrode material in lithium-ion batteries. As a sputtered thin film, it is relevant to miniature thin film batteries that power low-power devices such as portable electronics and micro electro mechanical systems (MEMS).
In a typical D.C. magnetron setup, the target bonded to a backing plate forms part of the cathode assembly in an evacuated chamber filled with an inert gas, preferably argon. Ionized gas strikes the target, releasing material that travels through the chamber and forms a LiCoO2 film on the substrate. The many adjustable process parameters give experienced users considerable control over film growth and microstructure.
- Deposition of LiCoO2 cathode thin films for thin film lithium batteries.
- Fabrication of power sources for MEMS and low-power portable electronic devices.
- D.C. magnetron sputtering of thin films onto substrates such as silicon wafers.
- Sputter etching where high etching anisotropy is required.
- Materials analysis by sputtering, such as secondary ion mass spectrometry (SIMS).
| Brand | Nanografi |
|---|---|
| CAS number | — |
| Molecular formula | — |
| Purity | 99.9% |
| Category | — |
| Pack sizes | 1 piece |
| Physical form | Dark blue or bluish-gray crystalline solid |
| Storage | — |
- Product code: NG0ST01LI11
- Material: Lithium Cobalt Oxide (LiCoO2)
- Size: 4''
- Thickness: 0.125''
- Bonding: Indium
- Product code: NG0ST01LI11
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