This lithium cobalt oxide (LiCoO2) sputtering target from Nanografi is a 1'' disc, 0.125'' thick, with 99.9% purity. It serves as the source material for depositing LiCoO2 thin films, the compound widely used in the positive electrodes of lithium-ion batteries. LiCoO2 itself is a crystalline solid with a dark blue or bluish-gray colour.
A key use is the fabrication of thin film batteries. As portable microelectronics and sensors keep shrinking, very small batteries are needed to power low power devices such as micro electro mechanical systems (MEMS). In a typical setup the target is bonded to a backing plate and run in a D.C. magnetron sputter system under an inert gas, preferably argon, so that ejected target material forms a LiCoO2 film on a nearby substrate.
Sputter deposition can coat substrates of many shapes and sizes, gives repeatable results, and can move from small R&D work to medium and large production areas. Its many process parameters give experienced users close control over film growth and microstructure.
- Depositing LiCoO2 cathode thin films for thin film lithium batteries.
- Producing power sources for low power portable electronics and MEMS devices.
- Thin film deposition onto substrates such as silicon wafers by D.C. magnetron sputtering.
- Research and development work that may later be scaled to larger substrate areas.
| Brand | Nanografi |
|---|---|
| CAS number | — |
| Molecular formula | — |
| Purity | 99.9% |
| Category | — |
| Pack sizes | 1 piece |
| Physical form | Dark blue or bluish-gray crystalline solid |
| Storage | — |
- Product code: NG0ST01LI01
- Material: Lithium Cobalt Oxide (LiCoO2)
- Size: 1''
- Thickness: 0.125''
- Product code: NG0ST01LI01
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