Lithium phosphate (Li3PO4) sputtering targets are dense ceramic source materials used in physical vapor deposition (PVD), such as RF or DC magnetron sputtering, to deposit thin films of lithium phosphate onto substrates. As an inorganic lithium phosphate compound, it belongs to the lithium oxyanion ceramic family, which is widely studied for ionic conduction and protective layers in energy-storage research.
- Quantity: 1 piece
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- Thin-film solid-state battery electrolyte and interlayer research
- Ion-conducting and protective coatings for electrode materials
- Deposition studies of ceramic oxide and phosphate thin films
- Development of optical and dielectric thin-film layers
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