Lithium phosphate (Li3PO4) sputtering targets are solid, inorganic ceramic source materials used in physical vapor deposition (PVD). During sputtering, energetic ions eject atoms from the target surface, which then condense onto a substrate to form a thin film. Lithium phosphate belongs to the lithium-containing phosphate family, a class of compounds widely studied for ion conduction and protective coatings.
- Quantity: 1 piece
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- Deposition of thin-film solid electrolytes for solid-state battery research
- Fabrication of protective or passivation coatings in materials research
- Development and optimization of sputtering processes for oxide and phosphate thin films
- Academic and industrial studies of lithium-ion transport in thin-film structures
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