Lithium Phosphate (Li3PO4) sputtering targets are solid ceramic sources of lithium phosphate, an inorganic oxide compound from the lithium phosphate family. In physical vapor deposition, the target is bombarded with energetic ions so that its material is ejected and deposited as a thin film onto a substrate. Lithium phosphate is widely studied as a component of ion-conducting and protective thin layers, which makes these targets useful for materials research and thin-film device development.
- Quantity: 1 piece
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- Deposition of lithium-ion conducting thin films for solid-state battery research
- Fabrication of protective or barrier coatings in materials science studies
- Development of functional thin layers for electrochemical and sensor prototypes
- Academic and industrial R&D in sputter-based thin-film processing
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