Lithium phosphate (Li3PO4) sputtering targets are solid, inorganic ceramic sources used in physical vapor deposition (PVD). They belong to the lithium phosphate compound group, which is widely studied for ionic conduction and protective thin-film layers. During sputtering, the target material is eroded by energetic ions and deposited onto a substrate as a thin film.
- Quantity: 1 piece
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- Deposition of solid-state electrolyte thin films for lithium-ion and solid-state battery research
- Protective or passivation coatings in materials and surface science studies
- Fabrication of dielectric and optical thin films for laboratory device prototyping
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