Lithium phosphate (Li3PO4) is an inorganic lithium-containing phosphate compound, belonging to the class of ceramic oxide materials. Sputtering targets are solid pieces of this material used as the source in physical vapor deposition (PVD), where atoms are ejected from the target and deposited onto a substrate to form thin films.
- Quantity: 1 piece
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- Deposition of solid-state electrolyte thin films for lithium-ion and thin-film battery research
- Preparation of precursor or interlayer coatings in studies of lithium-conducting electrolytes
- Research on protective and functional optical or dielectric coatings
- Surface and interface studies in materials science and device prototyping
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