Lithium phosphate (Li3PO4) is an inorganic lithium-containing phosphate ceramic, widely studied as a solid electrolyte and ionic conductor material. Sputtering targets are dense, solid sources of this material used in physical vapor deposition (PVD) to form thin films on substrates for research and development.
- Quantity: 1 piece
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- Thin-film solid-state battery electrolyte research
- Deposition of lithium-ion conducting thin layers
- Protective and functional coating studies
- PVD process development and thin-film characterization
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