Lithium titanate (Li2TiO3) is an inorganic lithium-containing ceramic oxide from the titanate family of functional ceramics. Sputtering targets are solid, dense ceramic plates used as the source material in physical vapor deposition (PVD), where material is sputtered onto a substrate to form thin films for research and development.
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- Thin-film solid electrolyte and battery interface research
- Deposition of ceramic dielectric or protective functional layers
- Tritium breeder material studies for fusion energy research
- Development of functional oxide films for sensor applications
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