Silicon carbide (SiC) sputtering targets are solid source plates made from a silicon carbide ceramic compound. They are used in physical vapor deposition (PVD) to form thin films on substrates. SiC belongs to the advanced ceramics and wide-bandgap semiconductor group, valued for its hardness, thermal stability, and chemical resistance.
- 1 piece
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- Deposition of SiC thin films for power and high-temperature electronic devices
- Protective hard coatings for wear and corrosion resistance
- Research on MEMS and optoelectronic components
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