Silicon nitride (Si3N4) is an advanced technical ceramic in the nitride compound class, known for its hardness, thermal stability, and electrically insulating behavior. As a sputtering target, it serves as a solid source material for physical vapor deposition, where it is sputtered to form thin films on substrates.
- Quantity: 1 piece
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- Dielectric and passivation layers in microelectronic devices
- Protective and barrier coatings on optical and mechanical components
- Thin-film research in MEMS and semiconductor process development
- Insulating layers in photonic and optoelectronic structures
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