Silicon nitride (Si3N4) is a covalent ceramic compound of silicon and nitrogen, known for its hardness, thermal stability, and electrical insulating properties. As a sputtering target, it serves as a solid source material in physical vapor deposition, where it is sputtered to form silicon nitride thin films on substrates. It belongs to the advanced technical ceramics group.
- Quantity: 1 piece
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- Dielectric and passivation layers in microelectronics research
- Protective and wear-resistant thin-film coatings
- Optical thin films for research and development
- Fabrication of MEMS device layers
- Diffusion barrier layers in materials research
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