Silicon nitride (Si3N4) is a covalently bonded technical ceramic belonging to the nitride ceramics group. It is known for its mechanical strength, hardness, thermal stability, and electrical insulation. Sputtering targets are solid source plates used in physical vapor deposition (PVD) to deposit thin films of the material onto substrates.
- Quantity: 1 piece
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- Deposition of dielectric and passivation layers in microelectronics and semiconductor research
- Protective hard coatings for cutting tools and wear-resistant components
- Optical and anti-reflective thin films
- Fabrication research for MEMS and other micro-scale devices
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