Silicon nitride (Si3N4) is a covalently bonded advanced ceramic from the nitride ceramics family. It is valued for its hardness, thermal stability, and electrical insulating properties. Sputtering targets are dense ceramic plates used as source material in physical vapor deposition (PVD) to form thin films on substrates.
- Quantity: 1 piece
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- Passivation and dielectric thin films in microelectronics research
- Diffusion and barrier layers in semiconductor device development
- Optical and protective coatings for research prototypes
- Hard, wear-resistant coatings for MEMS and precision components
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