Silicon (Si) sputtering targets are solid source plates used in physical vapor deposition (PVD) to deposit silicon thin films onto substrates. The undoped grade contains no intentionally added dopant, so the deposited film reflects the base silicon composition. Silicon belongs to the semiconductor and elemental material group and is widely used in electronics and coating research.
- Quantity: 1 piece
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- Thin-film deposition for semiconductor device research
- Silicon-based optical and protective coatings
- Microelectronics and MEMS process development
- Photovoltaic and solar cell materials research
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