Strontium titanate (SrTiO3) is an inorganic oxide ceramic with a perovskite crystal structure. It belongs to the family of complex metal oxides and is widely used as a source material for physical vapor deposition. In sputtering, a SrTiO3 target supplies atoms that form thin films on a substrate, and the material is also used as a single-crystal substrate for growing other oxide films.
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- Deposition of dielectric and high-permittivity thin films for capacitor and microelectronics research
- Epitaxial growth of oxide heterostructures and functional oxide thin films
- Research on oxide electronics and resistive switching memory devices
- Development of optical and photocatalytic thin-film coatings
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