Strontium titanate (SrTiO3) is a perovskite oxide ceramic widely studied in oxide electronics for its dielectric behavior and its use as a crystalline substrate. Sputtering targets are solid ceramic plates used as source material in physical vapor deposition to form thin films of this oxide on a substrate.
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- Thin-film deposition of perovskite oxide layers for materials research
- Substrates and buffer layers for epitaxial growth of functional oxide films
- Dielectric layer studies in oxide electronics and device prototyping
- Fabrication of oxide heterostructures for fundamental research
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