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Maximum Hotplate Temperature : 140 °C (284 °F) Stage Surface Roughness (RMS) : <3 μm* Stage Surface Flatness : <20 μm* Linear Motion Levelness : 0.05% variation (50 μm/100 mm travel)* Maximum Stage Travel Length : 150 mm (5.91") Maximum Head Width : 100 mm (3.94") Minimum Stage Speed : 50 μm.s-1 Maximum Stage Speed : 75 mm.s-1 Maximum Head to Substrate Travel Distance : 13 mm (0.51") Power Supply : DC 24 V, 6.2 A, via 100 – 240 V 50/60 Hz power adapter Dimensions (D x W x H) : 360 mm x 280 mm x 190 mm (14.2" x 11" x 7.5") Weight : 10.35 kg
