The Ossila Diaphragm Vacuum Pump (L2012A1) is a compact, oil-free low-vacuum pump built to hold substrates, wafers and tools in place on vacuum chucks and fixtures. It delivers a maximum flow of 7 L/min, runs at below 45 dBA and uses a DC brushless motor rated at 4 W.
Vibration is kept low through two isolation stages: the pump module floats on a four-point horizontal spring mount that absorbs motion in the X, Y and Z axes, while shock-absorbing rubber feet separate the metal chassis from the bench or optical table. This keeps probe tips steady and coating substrates undisturbed during operation.
Because no oil is used, maintenance is minimal and there is no risk of oil contamination. A built-in analog gauge reading in mbar and mmHg shows vacuum status at a glance and helps locate leaks, and a 6 mm push-fit connector links directly to Ossila equipment. The small footprint suits crowded glove boxes and lab benches.
- Holding silicon wafers and devices steady on probe station vacuum chucks during electrical characterization.
- Keeping flexible or rigid substrates flat on the vacuum bed of film applicators, doctor-blading or slot die coating systems.
- Securing vacuum-base micromanipulators and optical mounts to optical tables or probe stations.
- Supplying vacuum to manual or automated vacuum tweezers for handling delicate solar cells, OLEDs or glass coverslips.
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- Product code: L2012A1
- Pump Type: Diaphragm (oil-free)
- Maximum Flow: 7 L/min
- Max. Vacuum (gauge): -680 mbar (-510 mmHg)
- Max. Vacuum (abs): 330 mbar
- Noise: <45 dBA at 1 m
- Vibration: Low (dual-stage damped)
- Motor Type: DC Brushless
- Max. Power: 4 W
- Rated Pump Lifetime: 6000 hours
- Suitable Media: Air and Non-Flammable, Non-Corrosive Dry Gases Only (e.g. Nitrogen, Argon)
- Pump Head / Diaphragm / Valve Material: PPS / EPDM / EPDM
- Tubing Connector: 6 mm Push-fit
- Power Requirement: 24 VDC
- Weight: 1 kg
- Dimensions (L x W x H): 15 x 12 x 14 cm
Use the pump only with air or non-flammable, non-corrosive dry gases such as nitrogen or argon. The exhaust is vented externally and is intended for clean gas only; do not pump liquids or gases that need to be recovered.
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